Factors that influence the transport work of the RF coil
The RF coil is used for the transmission of high frequency energy to the plasma objects, in the course of this work, the influence factors of transmissionhas the following three aspects.
1, the coaxial precision and positioning accuracy, about the formation ofaccurate shape and stability of the plasma torch is very important, which requires replacement of the RF coil must be placed in the same position;
2, precise scale, RF coil as part of a radio frequency generator, its scale is also very important in the tuning circuit. Small scale change can produce smallchanges to the resistance or inductance, usually in the tuning circuit systemcan be compensated;
3, the basic metals or coating, the most effective conductor of RF energy issilver, the second is forged copper, and the conductivity of these materials is very small difference.
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